By Harmeet Bhugra,Gianluca Piazza

ISBN-10: 3319286862

ISBN-13: 9783319286860

This ebook introduces piezoelectric microelectromechanical (pMEMS) resonators to a large viewers via reviewing layout options together with use of finite aspect modeling, trying out and qualification of resonators, and fabrication and massive scale production suggestions to aid encourage destiny learn and entrepreneurial actions in pMEMS. The authors speak about the main intriguing advancements within the quarter of fabrics and units for the making of piezoelectric MEMS resonators, and supply direct examples of the technical demanding situations that must be conquer on the way to commercialize most of these units. a few of the themes coated include:
  • Widely-used piezoelectric fabrics, in addition to fabrics within which there's rising interest
  • Principle of operation and layout techniques for the making of flexural, contour-mode, thickness-mode, and shear-mode piezoelectric resonators, and examples of functional implementation of those devices
  • Large scale production ways, with a spotlight at the useful features linked to checking out and qualification
  • Examples of commercialization paths for piezoelectric MEMS resonators within the timing and the filter out markets
  • ...and more!
The authors current and educational views, making this publication excellent for engineers, graduate scholars, and researchers.

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Piezoelectric MEMS Resonators (Microsystems and Nanosystems) by Harmeet Bhugra,Gianluca Piazza


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